Systems utilizing multiple electron beams are an emerging semiconductor metrology technology that aims to increase throughput. El-Mul is a pioneer in developing detection solutions for such metrology systems and has designed and manufactured prototype detectors that can simultaneously detect 144 beams at 35MHz.
The detectors integrate a solid state, multi-pixel sensor, a multi-pixel feedthrough and two-stage amplifying electronics. Performance tests show a very low cross-talk between pixels (<1%). SNR is shot-noise limited when using a 5nA beam.