Semiconductor E-beam Systems
Semiconductor metrology and inspection tools present unique demands for detection systems. The requirements for increasingly higher throughput and the growing need to extract information from inner layers continuously drive El-Mul to develop novel technologies that rise up to these challenges.
El-Mul has become the world leader in fast detection technologies. Utilizing our very fast scintillator – ScintiFast™, proprietary fast low-noise amplifiers and unique methods for segmentation of the extracted signal we offer the most advanced detection solutions in this field.
Combining ScintiFast™ with a fast light sensor and specially developed electronics our detection systems can operate at 1nsec/pixel scan rate.
Technologies
| Technology | Description |
|---|---|
| ScintiFast™ | ScintiFast™ is El-Mul’s flagship scintillator technology enabling the next generation of detectors with shorter response time and higher sensitivity ... |
| Sub-ns-electron-detectors | Combining ScintiFastTM with fast light sensors and proprietary fast amplifiers El-Mul offers electron detectors with sub-nanosecond response time. An overall bandwidth |
| High Rate Multi Pixel | Systems utilizing multiple electron beams are an emerging semiconductor metrology technology that aims to increase throughput. El-Mul is a pioneer in developing detection solutions ... |
| SLIM™ | SLIM™ is an innovative design for under-the-column BSE detection. SLIM™ puts El-Mul’s ScintiFast™ together with a segmented, shaped light guide and Silicon Photomultipliers (SiPM) to create a fast ... |
| SpectroMax™ | El-Mul’s proprietary technologies enable unique solutions for compact BSE energy spectrometers. El-Mul's unique high-resistivity coating stands at the forefront of our energy filtering detection platform ... |
| Chamber Detectors | El-Mul manufactures a range of chamber detectors, providing a solution for desk-top SEMs, standard SEMs, FIB/SEM and lithography systems ... |
| In-Lens Detectors | In order to meet the challenges of in-lens detection we have developed annular, scintillator based SE and BSE detectors ... |
| Solid State Detectors | As the world of electron microscopy becomes more diversified, so do the specifications for solid state detectors. El-Mul offers several solid-state technologies in order to ensure best choice of diode for application requirements ... |
