Semiconductor E-beam Systems Detectors
Semiconductor metrology and inspection tools present unique demands for detection systems. The requirements for increasingly higher throughput and the growing need to extract information from inner layers continuously drive El-Mul to develop novel technologies that rise up to these challenges.
Semiconductor E-beam Systems Detectors
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Semiconductor metrology and inspection tools present unique demands for detection systems. The requirements for increasingly higher throughput and the growing need to extract information from inner layers continuously drive El-Mul to develop novel technologies that rise up to these challenges.
El-Mul part of Exosens has become the world leader in fast detection technologies. Utilizing our very fast scintillator – ScintiFast™, proprietary fast low-noise amplifiers and unique methods for segmentation of the extracted signal we offer the most advanced detection solutions in this field.
Combining ScintiFast™ with a fast light sensor and specially developed electronics our detection systems can operate at 1nsec/pixel scan rate.
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