Semiconductor E-beam Systems

Semiconductor metrology and inspection tools present unique demands for detection systems. The requirements for increasingly higher throughput and the growing need to extract information from inner layers continuously drive El-Mul to develop novel technologies that rise up to these challenges.

Such technologies include our very fast scintillator – ScintiFast™, matching low-noise amplifiers and unique methods for segmentation of the extracted signal.

Technologies

TechnologyDescription
ScintiFast™ ScintiFast™ is El-Mul’s flagship scintillator technology enabling the next generation of detectors with shorter response time and higher sensitivity ...
High Rate Multi PixelSystems utilizing multiple electron beams are an emerging semiconductor metrology technology that aims to increase throughput. El-Mul is a pioneer in developing detection solutions ...
SLIM™SLIM™ is an innovative design for under-the-column BSE detection. SLIM™ puts El-Mul’s ScintiFast™ together with a segmented, shaped light guide and Silicon Photomultipliers (SiPM) to create a fast ...
SpectroMax™El-Mul’s proprietary technologies enable unique solutions for compact BSE energy spectrometers. El-Mul's unique high-resistivity coating stands at the forefront of our energy filtering detection platform ...
Chamber DetectorsEl-Mul manufactures a range of chamber detectors, providing a solution for desk-top SEMs, standard SEMs, FIB/SEM and lithography systems ...
In-Lens DetectorsIn order to meet the challenges of in-lens detection we have developed annular, scintillator based SE and BSE detectors ...
Solid State DetectorsAs the world of electron microscopy becomes more diversified, so do the specifications for solid state detectors. El-Mul offers several solid-state technologies in order to ensure best choice of diode for application requirements ...