In order to meet the challenges of in-lens detection we have developed annular, scintillator based SE and BSE detectors. These designs feature a small through-hole that minimizes dead area and maximizes electron collection efficiency. Minimal through-hole diameter further increases and prevents beam distortion.
El-Mul’s know-how and production technologies ensure no interference between the detector and the primary beam. Light guide design, polished and appropriately coated thin profile, maximize light collection efficiency.