ElIon™

El-Mul was the first to present a commercial detection module for FIB/SEM tools that combines secondary ion (SI) and secondary electron (SE) modes of detection in a single compact device, without compromising either mode. This novel technology leap-frogged FIB/SEM tool performance and opened a range of possibilities for new ion beam applications.

Elion ion modes

Ion-Detection_A
Elion ion mode 1
Secondary ions, generated from the sample by the primary ion beam, are attracted into the detector and focused on the converter
Ion-Detection_B
Elion ion mode 2

Secondary ions create a proportional signal of secondary electrons, which is accelerated towards a ScintiMax™ screen.