Analytical SEM/STEM
From traditional Everhart-Thornley detectors, through a selection of
solid-state detectors and culminating with complex in-column, energy filter BSE detectors, El-Mul has a vast experience in turning proprietary and generic technologies into fit-for-purpose, engineered modules suitable for a variety of imaging applications.
Our offering includes the design and development of novel detectors as well as built-to-print manufacturing, supporting SEM, FIB and STEM systems. Technology platforms such as segmented detection, multi-mode ion/electron detection and others are implemented in detector design to provide “tailor-made” solutions for equipment manufacturers.
PMT modules are also offered and complement the “in vacuum” modules either as a separate module or as an integrated product.
Building on our ScintiFast™ technology, a fast detection technology platform which can support scan rates up to 1nsec/pixel is also available.
Technologies
| Technology | Description |
|---|---|
| ScintiFast™ | ScintiFast™ is El-Mul’s flagship scintillator technology enabling the next generation of detectors with shorter response time and higher sensitivity ... |
| SpectroMax™ | El-Mul’s proprietary technologies enable unique solutions for compact BSE energy spectrometers. El-Mul's unique high-resistivity coating stands at the forefront of our energy filtering detection platform ... |
| ElIon™ | El-Mul was the first to present a commercial detection module for FIB/SEM tools that combines secondary ion (SI) and secondary electron (SE) modes of detection in a single compact device ... |
| Opal™ STEM Detector | In a drive to meet our customers’ needs, El-Mul developed a detection solution for Scanning Transmission Electron Microscope (STEM) suitable for life science cryo-tomography ... |
| SLIM™ | SLIM™ is an innovative design for under-the-column BSE detection. SLIM™ puts El-Mul’s ScintiFast™ together with a segmented, shaped light guide and Silicon ... |
| 3Max | El-Mul's 3Max concept brings exciting new life to the Everhart-Thornley (ET) detection scheme. The unique design can be operated in two modes ... |
| Chamber Detectors | El-Mul manufactures a range of chamber detectors, providing a solution for desk-top SEMs, standard SEMs, FIB/SEM and lithography systems ... |
| In-Lens Detectors | In order to meet the challenges of in-lens detection we have developed annular, scintillator based SE and BSE detectors. These designs feature a small through-hole that minimizes dead area ... |
| Solid State Detectors | As the world of electron microscopy becomes more diversified, so do the specifications for solid state detectors. El-Mul offers several solid-state technologies in order to ensure best choice ... |
| High Rate Multi Pixel | Systems utilizing multiple electron beams are an emerging semiconductor metrology technology that aims to increase throughput ... |
