[Back to Ion Detectors]
El-Mul’s Elion™ platform brings electron and ion detection to levels never before seen in FIB and dual beam FIB/SEM systems.
Our patent-pending dual detection principle provides unsurpassed secondary ion imaging quality at much lower currents, greatly reducing sample damage and enabling ion beam use for routine sample imaging, where its high resolution and unique material contrast capabilities provide valuable analytical information.
- Combines SE and ion detection in a single high performance device
- Enables routine secondary ion imaging with minimum sample damage
- 10x to 100x improvement for ion detection
- Significantly improves SE detection over traditional chamber detectors
- Dramatically lengthens detector operating lifetime
- Customized platform engineering achieves optimal SE and ion detection
- Modular design simplifies field service (plug-in principle)
- Enables exciting new imaging applications
- Occupies standard ETD position, saving space, ports and video electronics
'We understand the very high engineering demands that are required by today’s fabs and research centers. Our Elion dual detection standard is the one to beat.'
-- Dr. Armin Schon, CEO, El-Mul Technologies
Product Literature
Elion Spec Sheet (PDF, 205 KB)
Related Links
Recent News: Elion™ chosen by leading FIB/SEM maker
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