Secondary Ion Detection
El-Mul was the first to present a commercial detection module for FIB/SEM tools that combines secondary ion (SI) and secondary electron (SE) mode detection in a single compact device without compromising either mode.

This novel technology leap-frogged FIB/SEM tool performance and opened a range of possibilities for new ion beam applications.

Secondary ions, generated from the sample by the primary ion beam, are attracted into the detector and focused on the converter
Secondary ions create a proportional signal of secondary electrons, which is accelerated towards a ScintiMax™ screen.