El-Mul Detector Improves Ion-lithography Capabilities of Raith Tools
Dr. Sven Bauerdick, Senior Product Manager, Raith GmbH
Raith is a leading provider and manufacturer of systems for nanofabrication, electron beam lithography, focused ion beam nanofabrication, nano-engineering and reverse engineering.
Our systems are diverse in both the employed technology and the target applications. This requires continuous improvement of all aspects of tool performance one being sophisticated electron and ion detection.
In summer 2013 we decided to invest in improving our detection capabilities. We needed various improvements in order to be technologically competitive and innovative. At the same time we wanted to make a single investment that will provide an answer to all of our diverse platforms. We turned to El-Mul, who is considered an expert in this field.
Within a short period we agreed on the specifications that will meet our needs. El-Mul started working and soon enough presented a concept that seemed promising. By keeping open communication channels El-Mul kept us updated on our project progress. Design reviews were done jointly. Prototype detectors were delivered on time and evaluated in Raith, and also at one of Raith's customer sites. Throughout the process El-Mul's team was very responsive and provided answers and solutions to any issue raised along the way.
As of today, we are involved in yet another joint project with El-Mul which, we believe, will lead to novel detection capabilities that none of our competitors have. Our Netherland site is also planning to hand over to El-Mul the design of their new detector.
Collaboration with El-Mul has, and will, help us maintain and increase our advantage in the competitive market of electron lithography and ion beam nanofabrication.
El-Mul Diode BSE Detector Enhances Carl Zeiss Tools' Capabilities
Dr. Michael Albiez, Senior Manager R&D Technology, Carl Zeiss NTS
Carl Zeiss NTS recognizes and gives credit to long-term, reliable suppliers.
When we decided to seek an alternative supplier for our BSE diode detector, it was
clear to us that the first candidate would be El-Mul Technologies.
El-Mul, a strategic partner,
responded positively to the request. They did not take it at face value though,
and decided to set a more ambitious objective: to provide more than just an equivalent
replacement. As with every detector that El-Mul develops, their aim was to find
a new technical advantage with clear value to our customers.
Open and frequent communications between El-Mul's team and mine were essential to
the success of this project.
Excellent communication was in fact at all levels—R&D, Engineering, Sourcing and
QA. The result was that the project progressed according to plan and we received
prototypes in a relatively short period.
Our evaluation proved that El-Mul's claims were correct. We received a diode detector
able to generate a BSE image with beam energies as low as 1kV. This capability enhanced
our tools' performance and widened the range of their applications.
Our Applications Group is very pleased with the new possibilities this detector
allows. As Heiner Jaksch, Applications Specialist says: "The El-Mul diode detector
enables our customers to image with primary electron energies as low as 1kV. With
the previous detector, imaging with energies below 5 kV was not possible. The El-Mul
diode detector secured several demos we would have lost against competition".
HHT Finds El-Mul an Innovative and Effective OEM Solution Provider
Toshihide Agemura, R&D manager, Hitachi High Technologies
When El-Mul approached us and presented their capabilities, I realized that this
was an opportunity to leverage their accumulated experience in detector design for
the instrument that I was developing at the time.
El-Mul promised us in-depth technical knowledge, innovation, a relatively short
design cycle and an effective solution. They delivered on all four points.
An experienced team of physicists examined our instrument and the performance of
its existing detector. Based on this information and El-Mul’s know-how, a unique
design was proposed - specific for the intended environment and purpose, with features
that I have not seen anywhere else.
El-Mul's team was responsive. They communicated with my team frequently and managed
the project meticulously, from the development stages, through to the delivery of
prototypes and their evaluation at HHT.
We have now approved El-Mul's detector for serial production and El-Mul as an HHT
My experience with El-Mul was very positive. Their capabilities in concept design,
engineering and production make them a reliable, cost effective OEM partner.
I have no doubt that they will provide an excellent solution for our next detector